Allan Olsen

US Patent 7087181 Method for fabricating micro-structures with various surface properties in multi-layer body by plasma etching

US Patent 7090781 Micro-actuator and method making the same

US Patent 7097778 Process for fabricating a micro-optical lens

US Patent 7097782 Method of exposing a substrate to a surface microwave plasma, etching method, deposition method, surface microwave plasma generating apparatus, semiconductor substrate etching apparatus, semiconductor substrate deposition apparatus, and microwave plasma generating antenna assembly

US Patent 7105102 Vacuum plasma processor having a chamber with electrodes and a coil for plasma excitation and method of operating same

US Patent 7138065 Method for removing at least one area of a layer of a component consisting of metal or a metal compound

US Patent 7147790 Perpendicular magnetic discrete track recording disk

US Patent 7153440 Surfactant-enhanced protection of micromechanical components from galvanic degradation

US Patent 7158159 Micro-machined nozzles

US Patent 7160475 Fabrication of three dimensional structures

US Patent 7163639 Metallic building element for optoelectronics

US Patent 7166261 Method of patterning products using chemical reaction

US Patent 7169314 Microfabricated elastomeric valve and pump systems

US Patent 7175772 Small scale actuators and methods for their formation and use

US Patent 7175774 Method of fabricating inkjet nozzles

US Patent 7179392 Method for forming a tunable piezoelectric microresonator

US Patent 7179396 Positive tone bi-layer imprint lithography method

US Patent 7182880 Process for reducing particle formation during etching

US Patent 7186348 Method for fabricating a pole tip in a magnetic transducer

US Patent 7186352 Microfluidic systems with embedded materials and structures and method thereof

US Patent 7189332 Apparatus and method for detecting an endpoint in a vapor phase etch

US Patent 7189336 Etchant, method for roughening copper surface and method for producing printed wiring board

US Patent 7192530 Method of manufacturing distributed analog phase shifter using etched ferroelectric thin film

US Patent 7204932 Polarization rotators

US Patent 7211197 Etching method and plasma processing method

US Patent 7214324 Technique for manufacturing micro-electro mechanical structures

US Patent 7214325 Method of fabricating ohmic contact on n-type gallium nitride (GaN) of room temperature by plasma surface treatment

US Patent 7214327 Anisotropic dry etching of Cu-containing layers

US Patent 7229563 Plasma etching of Ni-containing materials

US Patent 7229564 Method for manufacturing bipolar plate and direct methanol fuel cell

US Patent 7235184 Solid state membrane channel device for the measurement and characterization of atomic and molecular sized samples

US Patent 7238294 Procedure for etching of materials at the surface with focussed electron beam induced chemical reactions at said surface

US Patent 7240420 System and method for post-fabrication reduction of minimum feature size spacing of microcomponents

US Patent 7247248 Method of forming atomic force microscope tips

US Patent 7252773 Clean for high density capacitors

US Patent 7252776 Method for fabricating a thermal bubble inkjet print head with rapid ink refill mechanism and off-shooter heater

US Patent 7255805 Photonic structures, devices, and methods

US Patent 7258805 Micro needles and method of manufacture thereof

US Patent 7258807 Controlled growth of gallium nitride nanostructures

US Patent 7261830 Applying imprinting material to substrates employing electromagnetic fields

US Patent 7261831 Positive tone bi-layer imprint lithography method

US Patent 7264677 Process for treating solid surface and substrate surface

US Patent 7264742 Method of planarizing a surface

US Patent 7267779 Thermally efficient micromachined device

US Patent 7273563 Method for manufacturing a magnetic recording medium

US Patent 7276172 Method for preparing a nanowire crossbar structure and use of a structure prepared by this method

US Patent 7282158 Method of processing a workpiece

US Patent 7285227 Method of fabricating printhead to have aligned nozzle guard

US Patent 7285228 Device and method for anisotropic plasma etching of a substrate, a silicon body in particular

US Patent 7291278 Electrode forming method

US Patent 7291281 Head member, method for ink-repellent treatment and apparatus for the same

US Patent 7291285 Method and system for line-dimension control of an etch process

US Patent 7300595 Method for filling concave portions of concavo-convex pattern and method for manufacturing magnetic recording medium

US Patent 7311852 Method of plasma etching low-k dielectric materials

US Patent 7329363 Method of forming a hydrophobic coating layer on a surface of a nozzle plate for an ink-jet printhead

US Patent 7332098 Phase shift mask and fabricating method thereof

US Patent 7341764 Gas for plasma reaction, process for producing the same, and use

US Patent 7347951 Method of manufacturing electronic device

US Patent 7351346 Non-photolithographic method for forming a wire grid polarizer for optical and infrared wavelengths

US Patent 7354520 Method of manufacturing optical element

US Patent 7371332 Uniform etch system

US Patent 7378029 Method for manufacturing magnetic recording medium

US Patent 7384567 Method of manufacturing thin film magnetic head

US Patent 7387738 Removal of surface oxides by electron attachment for wafer bumping applications

US Patent 7402254 Method and structure for producing Z-axis interconnection assembly of printed wiring board elements

US Patent 7413670 Method for forming wiring on a substrate

US Patent 7413673 Method for adjusting voltage on a powered Faraday shield

US Patent 7416634 Method and apparatus for processing nanoscopic structures

US Patent 7419609 Method for quantifying over-etch of a conductive feature

US Patent 7429337 Method for removing at least one area of a layer of a component consisting of metal or a metal compound

US Patent 7438822 Apparatus and method for shielding a wafer from charged particles during plasma etching

US Patent 7438823 Imprint method for manufacturing micro capacitive ultrasonic transducer

US Patent 7445725 Surface bonding in halogenated polymeric components

US Patent 7449122 Micro-fabricated electrokinetic pump

US Patent 7449415 Gas for plasma reaction and process for producing thereof

US Patent 7452477 Procedure for etching of materials at the surface with focussed electron beam induced chemical reaction at said surface

US Patent 7455786 Piezoelectric oscillating circuit, method for manufacturing the same and filter arrangement

US Patent 7459095 Opaque chrome coating suitable for etching

US Patent 7459096 Method of making magnetic recording medium and die therefor

US Patent 7459099 Quartz-based nanoresonators and method of fabricating same

US Patent 7459100 Methods and apparatus for sequentially alternating among plasma processes in order to optimize a substrate

US Patent 7465407 Plasma processing method and apparatus

US Patent 7468138 Flexural plate wave sensor

US Patent 7468140 Method of protecting nozzle guarded printhead during fabrication

US Patent 7468141 Method for decorating die surface as well as die

US Patent 7470373 Optical interference display panel

US Patent 7470374 Manufacturing method and manufacturing apparatus of magnetic recording medium

US Patent 7470375 Method for manufacturing liquid ejection head, substrate for liquid ejection head, and liquid ejection head

US Patent 7476301 Procedure and device for the production of a plasma

US Patent 7476327 Method of manufacture for microelectromechanical devices

US Patent 7479187 Method for manufacturing silicon epitaxial wafer

US Patent 7479203 Lamination of dry film to micro-fluid ejection head substrates

US Patent 7479233 Mask blank for charged particle beam exposure, method of forming mask blank and mask for charged particle beam exposure

US Patent 7479234 Method for producing cavities having optically transparent wall

US Patent 7479235 Method for etching a workpiece

US Patent 7479304 Gas distribution plate fabricated from a solid yttrium oxide-comprising substrate

US Patent 7484513 Method of forming titanium film by CVD

US Patent 7488429 Method of dry etching, method of manufacturing magnetic recording medium, and magnetic recording medium

US Patent 7491344 Method for etching an object using a plasma and an object etched by a plasma

US Patent 7494555 Microfabricated elastomeric valve and pump systems

US Patent 7494593 Method for forming a cantilever and tip

US Patent 7494596 Measurement of etching

US Patent 7497961 Method of making an inkjet printhead

US Patent 7497962 Method of manufacturing liquid discharge head and method of manufacturing substrate for liquid discharge head

US Patent 7501072 Etching solution comprising hydrofluoric acid

US Patent 7504040 Plasma processing apparatus and plasma processing method

US Patent 7510664 Apparatus and method for atmospheric pressure reactive atom plasma processing for shaping of damage free surfaces

US Patent 7510666 Time continuous ion-ion plasma

US Patent 7510667 Plasma processing method and apparatus

US Patent 7517468 Etching method

US Patent 7520937 Thin film forming apparatus and method of cleaning the same

US Patent 7531103 Mask forming method, mask forming functional layer, dry etching method, and method of manufacturing an information recording medium

US Patent 7534360 Method of making diamond product and diamond product

US Patent 7534363 Method for providing uniform removal of organic material

US Patent 7537708 Procedure for etching of materials at the surface with focussed electron beam induced chemical reactions at said surface

US Patent 7540935 Plasma oxidation and removal of oxidized material

US Patent 7541283 Plasma processing method and plasma processing apparatus

US Patent 7553427 Plasma etching of Cu-containing layers

US Patent 7553773 Pressure control method and processing device

US Patent 7556740 Method for producing a solar cell

US Patent 7556741 Method for producing a solar cell

US Patent 7560036 System and method for drug delivery and microfluidic applications using microneedles

US Patent 7560037 Surfactant-enhanced protection of micromechanical components from galvanic degradation

US Patent 7560038 Thin film forming method and system

US Patent 7561332 Applications and fabrication techniques for large scale wire grid polarizers

US Patent 7563380 Electrode assembly for the removal of surface oxides by electron attachment

US Patent 7563381 High milling resistance write pole fabrication method for perpendicular recording

US Patent 7569152 Method for separating a useful layer and component obtained by said method

US Patent 7569154 Plasma processing method, plasma processing apparatus and computer storage medium

US Patent 7572385 Method of forming micro-lenses

US Patent 7575692 Method for etching chromium thin film and method for producing photomask

US Patent 7578947 Method for etching non-conductive substrate surfaces

US Patent 7582220 Etching method

US Patent 7585417 Method of fabricating a diaphragm of a capacitive microphone device

US Patent 7585420 Carbon nanotube substrates and catalyzed hot stamp for polishing and patterning the substrates

US Patent 7588693 Method of modifying an etched trench

US Patent 7588799 Metal film production apparatus

US Patent 7588815 Mask blank for charged particle beam exposure, method of forming mask blank and mask for charged particle beam exposure

US Patent 7591957 Method for atmospheric pressure reactive atom plasma processing for surface modification

US Patent 7597815 Process for producing a porous track membrane

US Patent 7601270 Microfabricated elastomeric valve and pump systems

US Patent 7601271 Process and equipment for bonding by molecular adhesion

US Patent 7608193 Perpendicular magnetic discrete track recording disk

US Patent 7608194 Photonic structures, devices, and methods

US Patent RE40951 Dry etching method for magnetic material

US Patent 7615161 Simplified way to manufacture a low cost cast type collimator assembly

US Patent 7618548 Silicon-containing structure with deep etched features, and method of manufacture

US Patent 7622049 Passivation for cleaning a material

US Patent 7625493 Method for manufacturing display device

US Patent 7628864 Substrate cleaning apparatus and method

US Patent 7628930 Method for forming micro lenses

US Patent 7632417 Method for forming nanostructure having high aspect ratio and method for forming nanopattern using the same

US Patent 7632419 Apparatus and method for monitoring processing of a substrate

US Patent 7645392 Methods for preparing a bonding surface of a semiconductor wafer

US Patent 7648731 Fabricating perpendicular write elements in perpendicular magnetic recording heads

US Patent 7648890 Process for producing silicon wafer

US Patent 7648914 Method for etching having a controlled distribution of process results

US Patent 7651945 Method for peeling off semiconductor element and method for manufacturing semiconductor device

US Patent 7652179 Gas for plasma reaction, process for producing the same, and use thereof

US Patent 7658802 Apparatus and a method for cleaning a dielectric film

US Patent 7658815 Plasma processing apparatus capable of controlling plasma emission intensity

US Patent 7659212 Process control method in spin etching and spin etching apparatus

US Patent 7666319 Semiconductor etching process to release single crystal silicon mirrors

US Patent 7674390 Zeolite—sol gel nano-composite low k dielectric

US Patent 7674393 Etching method and apparatus

US Patent 7682979 Phase change alloy etch

US Patent 7682983 Manufacturing method of electronic device with resist ashing

US Patent 7686973 Silicon wafer etching method and apparatus, and impurity analysis method

US Patent 7695633 Independent control of ion density, ion energy distribution and ion dissociation in a plasma reactor

US Patent 7695784 Post positioning for interdigital bonded composite

US Patent 7695983 Independent control of ion density, ion energy distribution and ion dissociation in a plasma reactor

US Patent 7700378 Method and system for line-dimension control of an etch process

US Patent 7704772 Method of manufacture for microelectromechanical devices

US Patent 7704887 Remote plasma pre-clean with low hydrogen pressure

US Patent 7708899 Method for forming micro lenses

US Patent 7709391 Methods for in-situ generation of reactive etch and growth specie in film formation processes

US Patent 7713756 Apparatus and method for plasma etching

US Patent 7714414 Method and apparatus for polymer dielectric surface recovery by ion implantation

US Patent 7718081 Techniques for the use of amorphous carbon (APF) for various etch and litho integration schemes

US Patent 7723232 Full backside etching for pressure sensing silicon

US Patent 7727409 Magnetoresistance effect device and method of production thereof

US Patent 7727410 Process for formation of three-dimensional photonic crystal

US Patent 7727681 Electron beam processing for mask repair

US Patent 7731860 Ion beam method for removing an organic light emitting material

US Patent 7737049 Method for forming a structure on a substrate and device

US Patent 7740767 Method and apparatus for manufacturing patterned media

US Patent 7744771 Method for removing protective film on article

US Patent 7749396 Method of manufacturing fine features for thin film transistors

US Patent 7754543 Method of patterning multiple-layered resist film and method of manufacturing semiconductor device

US Patent 7754610 Process for etching tungsten silicide overlying polysilicon particularly in a flash memory

US Patent 7754997 Apparatus and method to confine plasma and reduce flow resistance in a plasma

US Patent 7758718 Reduced electric field arrangement for managing plasma confinement

US Patent 7758739 Methods of producing structures for electron beam induced resonance using plating and/or etching

US Patent 7763545 Semiconductor device manufacturing method

US Patent 7767582 Method of manufacturing semiconductor device

US Patent 7771602 Method and apparatus for manufacturing magnetic recording media

US Patent 7771607 Plasma processing apparatus and plasma processing method

US Patent 7776225 Method for forming on-chip lens including process of forming depression by using etch-back method, and method for manufacturing solid-state imaging apparatus including process of forming in-layer micro lens using the method for forming on-chip lens

US Patent 7776227 Process for manufacturing micro- and nano- devices

US Patent 7776745 Method for etching silicon-germanium in the presence of silicon

US Patent 7785504 Thin film patterning apparatus and method of fabricating color filter array substrate using the same

US Patent 7799238 Plasma processing method and plasma processing apparatus

US Patent 7803713 Method for fabricating air gap for semiconductor device

US Patent 7829467 Method for producing a polished semiconductor

US Patent 7837793 Method of manufacturing diamond substrates

US Patent 7837887 Method of forming an ink supply channel

US Patent 7837888 Composition and method for damascene CMP

US Patent 7842223 Plasma process for removing excess molding material from a substrate

US Patent 7846264 Cleaning method used in removing contaminants from a solid yttrium oxide-containing substrate

US Patent 7862732 Method for forming micro lenses and semiconductor device including the micro lenses

US Patent 7862733 Method for manufacturing a probe

US Patent 7871931 Method for chemical mechanical planarization of a metal layer located over a photoresist layer and a method for manufacturing a micro pixel array using the same

US Patent 7875196 Method for forming micro lenses

US Patent 7883632 Plasma processing method

US Patent 7883633 Method for shaping a magnetic field in a magnetic field-enhanced plasma reactor

US Patent 7884027 Method of manufacturing semiconductor device

US Patent 7888265 Method for assaying copper in silicon wafers

US Patent 7897029 Removal of surface oxides by electron attachment

US Patent 7897058 Device manufacturing method and computer program product

US Patent 7914623 Post-ion implant cleaning for silicon on insulator substrate preparation

US Patent 7919415 Process of manufacturing a semiconductor device

US Patent 7927497 Integrated thin-film solar cells and method of manufacturing thereof and processing method of transparent electrode for integrated thin-film solar cells and structure thereof, and transparent substrate having processed transparent electrode

US Patent 7927500 Poly etch without separate oxide decap

US Patent 7931820 Dry etching gas and method for dry etching

US Patent 7935262 Method of manufacturing fine patterns

US Patent 7938973 Arc layer having a reduced flaking tendency and a method of manufacturing the same

US Patent 7947189 Vacuum processing apparatus and vacuum processing method of sample

US Patent 7951299 Method of fabricating a microresonator

US Patent 7951716 Wafer and method of producing the same

US Patent 7955510 Oxide etch with NH4-NF3 chemistry

US Patent 7959815 Transparent textured substrate and methods for obtaining same

US Patent 7959817 Door skin, a method of etching a plate, and an etched plate formed therefrom

US Patent 7960284 III-V compound semiconductor substrate manufacturing method

US Patent 7964509 Mass production method of semiconductor integrated circuit device and manufacturing method of electronic device

US Patent 7967995 Multi-layer/multi-input/multi-output (MLMIMO) models and method for using

US Patent 7972963 Polished semiconductor wafer and process for producing it

US Patent 7976723 Method for kinetically controlled etching of copper

US Patent 7985687 System and method for improving reliability in a semiconductor device

US Patent 7988872 Method of operating a capacitively coupled plasma reactor with dual temperature control loops

US Patent 7998651 Imprint lithography

US Patent 8002933 Microfabricated elastomeric valve and pump systems

US Patent 8007675 System and method for controlling an etch process for a single crystal having a buried layer

US Patent 8008202 Ruthenium CMP compositions and methods

US Patent 8012365 Deep anisotropic silicon etch method