Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Somen Choudhury0
Baohua Chen0
Hongtao Ma0
Hongxin Fang0
Baiqing Zhang0
Date of Patent
July 14, 2009
0Patent Application Number
109458730
Date Filed
September 22, 2004
0Patent Primary Examiner
Patent abstract
A thin-film forming method, which includes the steps of: (1) holding at least one object in a chamber; (2) depositing a film-forming material on the object; (3) etching the forming material while depositing is conducted. In the present invention, the depositing and etching are controlled to simultaneously conduct. The invention also disclose a system for performing the method.
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