US Patent 7560038 Thin film forming method and system
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Patent Inventor Names
Baiqing Zhang0
Baohua Chen0
Hongtao Ma0
Hongxin Fang0
Somen Choudhury0
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Patent abstract
A thin-film forming method, which includes the steps of: (1) holding at least one object in a chamber; (2) depositing a film-forming material on the object; (3) etching the forming material while depositing is conducted. In the present invention, the depositing and etching are controlled to simultaneously conduct. The invention also disclose a system for performing the method.
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US Patent 07560038 Thin film forming method and system US Patent 7560038 Thin film forming method and system
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Patent Number
075600380
Patent Number
75600380
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Patent Jurisdiction
Patent Number
075600380
Date of Patent
July 14, 2009
0Patent Application Number
109458730
Date Filed
September 22, 2004
0Official Website
Patent Primary Examiner
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US Patent 07560038 Thin film forming method and system
Infobox
Is a
Patent jurisdiction
Patent number
07560038
Date of patent
July 14, 2009
Patent application number
10945873
Date Filed
September 22, 2004
Patent primary examiner
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