Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Yoshimitsu Kodaira0
Taichi Hiromi0
Date of Patent
November 10, 2009
0Patent Application Number
121382800
Date Filed
June 12, 2008
0Patent Citations Received
Patent Primary Examiner
Patent abstract
A dry etching method in which a plasma of an etching gas is generated and a magnetic material is dry-etched using a mask material made of a non-organic material, wherein an alcohol having at least one hydroxyl group is used as the etching gas. The alcohol used as the etching gas has one hydroxyl group such as an alcohol selected from the group including methanol (CH3OH), ethanol (C2H5OH) and propanol (C3H7OH).
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