US Patent 7572385 Method of forming micro-lenses

Patent 7572385 was granted and assigned to Micron Technology on August, 2009 by the United States Patent and Trademark Office.

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Is a

Patent

Patent attributes

Current Assignee

Micron Technology

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

7572385

Date of Patent

August 11, 2009

Patent Application Number

10713188

Date Filed

November 17, 2003

Patent Primary Examiner

‌

Allan Olsen

Patent abstract

A method of fabricating micro-lenses is provided. A first layer is formed on a substrate. The first layer is comprised of a first material and the substrate is comprised of a second material. An opening is formed in the first layer and an etchant is provided in the opening to etch both the substrate and the first layer to form a first mold for a first micro-lens. The etchant etches the first layer at a different rate than the substrate. A lens material is added to the etched molds to form micro-lenses.