Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Steven Berger0
Sybren J. Sijbrandij0
Christian R. Musil0
Diane K. Stewart0
J. David Casey, Jr.0
John Beaty0
Date of Patent
June 1, 2010
Patent Application Number
10758966
Date Filed
January 16, 2004
Patent Citations Received
Patent Primary Examiner
Patent abstract
Transmissivity is restored to a gallium stained substrate by directing an electron beam to the substrate in the presence of an etching gas. For higher concentrations of implanted gallium, the transparency can be substantially restored without reducing the thickness of the substrate. For lower doses of implanted gallium, the transmission is restored to 100%, although the thickness of the substrate is reduced. The invention is suitable for use in the repair of photolithography masks.
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