Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Hyung Joo Lee0
Radha Sundararajan0
Asao Yamashita0
Daniel Prager0
Merritt Funk0
Date of Patent
June 28, 2011
0Patent Application Number
120596240
Date Filed
March 31, 2008
0Patent Citations Received
Patent Primary Examiner
Patent abstract
The invention provides a method of processing a substrate using multilayer processing sequences and Multi-Layer/Multi-Input/Multi-Output (MLMIMO) models and libraries that can include one or more masking layer creation procedures, one or more pre-processing measurement procedures, one or more Partial-Etch (P-E) procedures, one or more Final-Etch (F-E) procedures, and one or more post-processing measurement procedures.
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