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US Patent 7967995 Multi-layer/multi-input/multi-output (MLMIMO) models and method for using

Patent 7967995 was granted and assigned to Tokyo Electron on June, 2011 by the United States Patent and Trademark Office.

OverviewStructured DataIssuesContributors
Is a
Patent
Patent
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Current Assignee
Tokyo Electron
Tokyo Electron
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Date Filed
March 31, 2008
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Date of Patent
June 28, 2011
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Patent Application Number
12059624
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Patent Citations Received
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US Patent 11704463 Method of etch model calibration using optical scatterometry
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US Patent 11921433 Optical metrology in machine learning to characterize features
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Patent Inventor Names
Hyung Joo Lee
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Radha Sundararajan
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Asao Yamashita
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Daniel Prager
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Merritt Funk
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
7967995
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Patent Primary Examiner
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Allan Olsen
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