Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Rudolf Rhein0
Claudia Wiegand0
Eberhard Tempel0
Date of Patent
March 10, 2009
0Patent Application Number
117304800
Date Filed
April 2, 2007
0Patent Primary Examiner
Patent abstract
This invention relates to etching solutions which comprise hydrofluoric acid and organic solvents for use in the process for the production of integrated circuits. The etching solutions according to the invention are particularly suitable for the selective etching of doped silicate layers.
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