Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Ming-Hau Tung0
Clarence Chui0
John Batey0
Manish Kothari0
Brian James Gally0
Date of Patent
January 13, 2009
0Patent Application Number
108393290
Date Filed
May 4, 2004
0Patent Primary Examiner
Patent abstract
A method of manufacturing a microelectromechanical device includes forming at least two conductive layers on a substrate. An isolation layer is formed between the two conductive layers. The conductive layers are electrically coupled together and then the isolation layer is removed to form a gap between the conductive layers. The electrical coupling of the layers mitigates or eliminates the effects of electrostatic charge build up on the device during the removal process.
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