US Patent 7186164 Processing pad assembly with zone control
Patent 7186164 was granted and assigned to Applied Materials on March, 2007 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
December 3, 2003
Date of Patent
March 6, 2007
Patent Application Number
10727774
Patent Citations Received
Patent Inventor Names
Antoine P. Manens
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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