Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Antoine P. Manens0
Date of Patent
March 6, 2007
Patent Application Number
10727774
Date Filed
December 3, 2003
Patent Citations Received
...
Patent Primary Examiner
Patent abstract
An electrochemical mechanical processing station having a zoned polishing pad assembly is provided. The zoned polishing pad assembly includes a conductive layer coupled to an upper layer having a non-conductive processing surface. At least two zones of different current permeability are defined across the processing surface of the upper layer. Each zone is defined by an attribute of the upper layer.
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