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US Patent 11958162 CMP pad construction with composite material properties using additive manufacturing processes

Patent 11958162 was granted and assigned to Applied Materials on April, 2024 by the United States Patent and Trademark Office.

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Contents

Is a
Patent
Patent
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Patent attributes

Patent Applicant
Applied Materials
Applied Materials
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Current Assignee
Applied Materials
Applied Materials
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
119581620
Patent Inventor Names
Nag B. Patibandla0
Rajeev Bajaj0
Robert E. Davenport0
Kasiraman Krishnan0
Daniel Redfield0
Fred C. Redeker0
Russell Edward Perry0
Gregory E. Menk0
...
Date of Patent
April 16, 2024
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Patent Application Number
167460650
Date Filed
January 17, 2020
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Patent Citations
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US Patent 6860793 Window portion with an adjusted rate of wear
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US Patent 6860802 Polishing pads for chemical mechanical planarization
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US Patent 6866807 High-precision modeling filament
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US Patent 6869350 Polishing pads and methods relating thereto
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US Patent 6875096 Chemical mechanical polishing pad having holes and or grooves
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US Patent 6875097 Fixed abrasive CMP pad with built-in additives
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US Patent 6896593 Microporous polishing pads
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US Patent 6896765 Method and apparatus for the compensation of edge ring wear in a plasma processing chamber
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...
Patent Primary Examiner
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Joel D Crandall
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CPC Code
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B24B 37/26
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B24D 3/20
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B24D 3/28
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B24B 37/20
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B24D 18/0045
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B24D 18/009
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B24D 3/32
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B24B 37/22
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Patent abstract

Embodiments of the disclosure generally provide polishing pads having a composite pad body and methods for forming the polishing pads. In one embodiment, the composite pad body includes one or more first features formed from a first material or a first composition of materials, and one or more second features formed from a second material or a second composition of materials, wherein the one or more first features and the one or more second features are formed by depositing a plurality of layers comprising the first material or first composition of materials and second material or second composition of materials.

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