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US Patent 8702479 Polishing pad with multi-modal distribution of pore diameters

Patent 8702479 was granted and assigned to Nexplanar Corporation on April, 2014 by the United States Patent and Trademark Office.

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Patent Citations Received
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US Patent 12023853 Polishing articles and integrated system and methods for manufacturing chemical mechanical polishing articles
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US Patent 11986922 Techniques for combining CMP process tracking data with 3D printed CMP consumables
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US Patent 11980992 Integrated abrasive polishing pads and manufacturing methods
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US Patent 11964359 Apparatus and method of forming a polishing article that has a desired zeta potential
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US Patent 11851570 Anionic polishing pads formed by printing processes
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Patent abstract

Polishing pads with multi-modal distributions of pore diameters are described. Methods of fabricating polishing pads with multi-modal distributions of pore diameters are also described.

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Patent Inventor Names
Diane Scott0
James P. LaCasse0
Ping Huang0
William C. Allison0
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Patent Citations Received
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US Patent 11685014 Formulations for advanced polishing pads
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Official Website
https://pdfpiw.uspto.gov/.piw?Docid=087024790
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US Patent 08702479 Polishing pad with multi-modal distribution of pore diameters US Patent 8702479 Polishing pad with multi-modal distribution of pore diameters

Infobox
Patent Number
087024790
Patent Number
87024790
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Infobox
Is a
Patent
Patent
0
Current Assignee
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Nexplanar Corporation
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
087024790
Date of Patent
April 22, 2014
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Patent Application Number
129791230
Date Filed
December 27, 2010
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Official Website
https://pdfpiw.uspto.gov/.piw?Docid=087024790
Patent Primary Examiner
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Maurina Rachuba
0
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Website URL
https://pdfpiw.uspto.gov/.piw?Docid=08702479
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 US Patent 08702479 Polishing pad with multi-modal distribution of pore diameters

Infobox
Is a
Patent
Patent
Current assignee
‌
Nexplanar Corporation
Patent jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent number
08702479
Date of patent
April 22, 2014
Patent application number
12979123
Date Filed
December 27, 2010
Patent primary examiner
‌
Maurina Rachuba

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