Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Steven Naugler7
Weitung Wang7
Steven J. Pufka7
Jeffrey R. Stack7
Date of Patent
June 26, 2007
Patent Application Number
11592910
Date Filed
November 3, 2006
Patent Citations Received
Patent Primary Examiner
Patent abstract
A method is provided for forming grooves in a polishing pad useful for planarizing a substrate in a chemical mechanical planarization process. The method maintains average velocity as a function of bit diameter to enable groove formation using a rotating bit, whereby grooves can be formed at a higher rate while maintaining high groove quality and low defectivity.
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