Is a
Patent attributes
Patent Applicant
0
Patent Jurisdiction
Patent Number
Patent Inventor Names
Naoto Kubo0
William D. Budinger0
Date of Patent
March 1, 2005
0Patent Application Number
098053280
Date Filed
March 13, 2001
0Patent Citations Received
Patent Primary Examiner
Patent abstract
A polishing pad includes a polishing layer, and the transparent window portion of the polishing layer having dispersed particles to increase the rate at which the window portion wears away during a polishing operation, and to avoid forming a lump in the polishing layer.
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