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US Patent 11018047 Hybrid lift pin

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Patent Citations Received
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US Patent D1009817 Shadow ring lift pin
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Patent abstract

A lift pin and a substrate support assembly and reactor including the lift pin are disclosed. The lift pin includes first section comprising a material having a first transparency and a second section comprising a material having a second transparency. The lift pin can provide improved temperature uniformity across substrate support assembly including the lift pin during substrate processing.

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Patent Inventor Names
Eric Hill0
Uday Kiran Rokkam0
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Patent Citations Received
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US Patent 11764101 Susceptor for semiconductor substrate processing
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Official Website
https://pdfpiw.uspto.gov/.piw?Docid=110180470
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Infobox
Is a
Patent
Patent
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
110180470
Date of Patent
May 25, 2021
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Patent Application Number
162058990
Date Filed
November 30, 2018
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Official Website
https://pdfpiw.uspto.gov/.piw?Docid=110180470
Patent Citations
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US Patent 10018920 Lithography patterning with a gas phase resist
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US Patent 10023960 Process gas management for an inductively-coupled plasma deposition reactor
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US Patent 10032628 Source/drain performance through conformal solid state doping
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US Patent 10032792 Semiconductor device and manufacturing method thereof
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US Patent 10043661 Method for protecting layer by forming hydrocarbon-based extremely thin film
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US Patent 10047435 Dual selective deposition
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US Patent 10053774 Reactor system for sublimation of pre-clean byproducts and method thereof
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US Patent 10060473 Energy conversion systems and methods
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US Patent 10083836 Formation of boron-doped titanium metal films with high work function
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US Patent 10087522 Deposition of metal borides
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US Patent 10087525 Variable gap hard stop design
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US Patent 10090316 3D stacked multilayer semiconductor memory using doped select transistor channel
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US Patent 10103040 Apparatus and method for manufacturing a semiconductor device
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US Patent 10106892 Thermal oxide equivalent low temperature ALD oxide for dual purpose gate oxide and method for producing the same
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US Patent 10121671 Methods of depositing metal films using metal oxyhalide precursors
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US Patent 10134617 Wafer carrier having thermal cover for chemical vapor deposition systems
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US Patent 10134757 Method of processing a substrate and a device manufactured by using the method
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US Patent 10147600 Methods for forming doped silicon oxide thin films
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US Patent 10167557 Gas distribution system, reactor including the system, and methods of using the same
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US Patent 10177024 High temperature substrate pedestal module and components thereof
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US Patent 10177025 Method and apparatus for filling a gap
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US Patent 10179947 Method for forming conformal nitrided, oxidized, or carbonized dielectric film by atomic layer deposition
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US Patent 10186420 Formation of silicon-containing thin films
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US Patent 10190213 Deposition of metal borides
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US Patent 10190214 Deposition apparatus and deposition system having the same
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US Patent 10190701 Corrosion control for chamber components
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US Patent 10193429 Air gap control systems and methods
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US Patent 10211308 NbMC layers
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US Patent 10229833 Methods for forming a transition metal nitride film on a substrate by atomic layer deposition and related semiconductor device structures
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US Patent 10236177 Methods for depositing a doped germanium tin semiconductor and related semiconductor device structures
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US Patent 10249524 Cassette holder assembly for a substrate cassette and holding member for use in such assembly
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US Patent 10249577 Method of forming metal interconnection and method of fabricating semiconductor apparatus using the method
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US Patent 10262859 Process for forming a film on a substrate using multi-port injection assemblies
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US Patent 10269558 Method of forming a structure on a substrate
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US Patent 10312055 Method of depositing film by PEALD using negative bias
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US Patent 10312129 Variable adjustment for precise matching of multiple chamber cavity housings
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US Patent 10290508 Method for forming vertical spacers for spacer-defined patterning
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US Patent 10319588 Method for depositing a metal chalcogenide on a substrate by cyclical deposition
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US Patent 10283353 Method of reforming insulating film deposited on substrate with recess pattern
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US Patent 10276355 Multi-zone reactor, system including the reactor, and method of using the same
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US Patent 10322384 Counter flow mixer for process chamber
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US Patent 10340125 Pulsed remote plasma method and system
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US Patent 10340135 Method of topologically restricted plasma-enhanced cyclic deposition of silicon or metal nitride
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US Patent 10343920 Aligned carbon nanotubes
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US Patent 10347547 Suppressing interfacial reactions by varying the wafer temperature throughout deposition
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US Patent 10361201 Semiconductor structure and device formed using selective epitaxial process
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US Patent 10367080 Method of forming a germanium oxynitride film
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US Patent 10388513 Method for depositing silicon-free carbon-containing film as gap-fill layer by pulse plasma-assisted deposition
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US Patent 10395917 Si precursors for deposition of SiN at low temperatures
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US Patent 10395919 Method and apparatus for filling a gap
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US Patent 10400335 Dual-direction chemical delivery system for ALD/CVD chambers
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US Patent 10428419 Combination CVD/ALD method, source and pulse profile modification
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US Patent 10435790 Method of subatmospheric plasma-enhanced ALD using capacitively coupled electrodes with narrow gap
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US Patent 10468244 Precursors and flowable CVD methods for making low-K films to fill surface features
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US Patent 10468251 Method for forming spacers using silicon nitride film for spacer-defined multiple patterning
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US Patent 10483154 Front-end-of-line device structure and method of forming such a front-end-of-line device structure
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US Patent 10529554 Method for forming silicon nitride film selectively on sidewalls or flat surfaces of trenches
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Patent Citations Received
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US Patent D958764 Higher temperature vented susceptor
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US Patent 11404302 Substrate susceptor using edge purging
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Patent Primary Examiner
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Charlee J. C. Bennett
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