Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
January 29, 2019
Patent Application Number
15135333
Date Filed
April 21, 2016
Patent Citations Received
...
Patent Primary Examiner
Patent abstract
A method for depositing a metal film onto a substrate is disclosed. In particular, the method comprises pulsing a metal halide precursor onto the substrate and pulsing a decaborane precursor onto the substrate. A reaction between the metal halide precursor and the decaborane precursor forms a metal film, specifically a metal boride.
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