Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Timo Asikainen0
Chiyu Zhu0
Robert Brennan Milligan0
Date of Patent
January 25, 2022
0Patent Application Number
162403920
Date Filed
January 4, 2019
0Patent Citations
Patent Primary Examiner
Patent abstract
Methods of forming thin-film structures including one or more NbMC layers, and structures and devices including the one or more NbMC layers are disclosed. The NbMC layers enable tuning of various structure and device properties, including resistivity, current leakage, and work function.
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