‌

US Patent D947913 Susceptor shaft

Overview Structured Data Issues Contributors

Is a

0

Patent attributes

Patent Jurisdiction

United States Patent and Trademark Office

0

Patent Number

Patent Inventor Names

Aniket Patil0

Sam Kim0

Date of Patent

April 5, 2022

0

Patent Application Number

296917170

Date Filed

May 17, 2019

0

Patent Citations

US Patent 10018920 Lithography patterning with a gas phase resist

US Patent 10023960 Process gas management for an inductively-coupled plasma deposition reactor

US Patent 10032792 Semiconductor device and manufacturing method thereof

0

US Patent 10043661 Method for protecting layer by forming hydrocarbon-based extremely thin film

0

US Patent 10047435 Dual selective deposition

US Patent 10053774 Reactor system for sublimation of pre-clean byproducts and method thereof

0

US Patent 10060473 Energy conversion systems and methods

US Patent 10083836 Formation of boron-doped titanium metal films with high work function

...

Patent Primary Examiner

Elizabeth J Oswecki

0

CPC Code

0

0

0

0

0

0

0

0

...

No article content yet.

Timeline

No Timeline data yet.

Further Resources

Title

Author

Link

Type

Date

No Further Resources data yet.

References

Find more entities like US Patent D947913 Susceptor shaft

Use the Golden Query Tool to find similar entities by any field in the Knowledge Graph, including industry, location, and more.

Open Query Tool

Golden Query Tool

By using this site, you agree to our Terms of Service.