Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Marko Tuominen0
Antti Niskanen0
Eva Tois0
Hannu Huotari0
Raija H. Matero0
Suvi P. Haukka0
Viljami J. Pore0
Date of Patent
August 14, 2018
0Patent Application Number
146878330
Date Filed
April 15, 2015
0Patent Citations Received
...
Patent Primary Examiner
Patent abstract
Methods are provided for dual selective deposition of a first material on a first surface of a substrate and a second material on a second, different surface of the same substrate. The selectively deposited materials may be, for example, metal, metal oxide, or dielectric materials.
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