Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Viljami J. Pore
Eva E. Tois
Date of Patent
October 31, 2023
Patent Application Number
17934817
Date Filed
September 23, 2022
Patent Citations
...
Patent Primary Examiner
Patent abstract
Methods and systems for selectively depositing dielectric films on a first surface of a substrate relative to a passivation layer previously deposited on a second surface are provided. The methods can include at least one cyclical deposition process used to deposit material on the first surface while the passivation layer is removed, thereby preventing deposition over the passivation layer.
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