Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Fu Tang0
Michael Eugene Givens0
Qi Xie0
Xiaoqiang Jiang0
Jan Willem Maes0
Date of Patent
July 30, 2019
0Patent Application Number
151445060
Date Filed
May 2, 2016
0Patent Citations
Patent Citations Received
...
Patent Primary Examiner
Patent abstract
A method for forming layers suitable for a V-NAND stack is disclosed. Specifically, the method may include multiple cycles for forming an oxide and a nitride in order to form an oxynitride layer.
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