Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
October 16, 2018
Patent Application Number
15476035
Date Filed
March 31, 2017
Patent Citations Received
...
Patent Primary Examiner
Patent abstract
The invention relates to an apparatus for manufacturing a semiconductor device comprising a reaction chamber comprising a substrate holder for holding a substrate; and, a heater for heating the substrate. The heater may comprise a vertical cavity surface emitting laser constructed and arranged to emit a radiation beam to a substrate held by the substrate holder to heat the substrate.
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