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US Patent 11018047 Hybrid lift pin

OverviewStructured DataIssuesContributorsActivity
Is a
Patent
Patent
0
Date Filed
November 30, 2018
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Date of Patent
May 25, 2021
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Patent Application Number
16205899
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Patent Citations
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US Patent 10388513 Method for depositing silicon-free carbon-containing film as gap-fill layer by pulse plasma-assisted deposition
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US Patent 10395917 Si precursors for deposition of SiN at low temperatures
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US Patent 10395919 Method and apparatus for filling a gap
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US Patent 10400335 Dual-direction chemical delivery system for ALD/CVD chambers
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US Patent 10428419 Combination CVD/ALD method, source and pulse profile modification
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US Patent 10435790 Method of subatmospheric plasma-enhanced ALD using capacitively coupled electrodes with narrow gap
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US Patent 10468244 Precursors and flowable CVD methods for making low-K films to fill surface features
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US Patent 10468251 Method for forming spacers using silicon nitride film for spacer-defined multiple patterning
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US Patent 10483154 Front-end-of-line device structure and method of forming such a front-end-of-line device structure
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US Patent 10529554 Method for forming silicon nitride film selectively on sidewalls or flat surfaces of trenches
•••
Patent Citations Received
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US Patent 11404302 Substrate susceptor using edge purging
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US Patent D1009817 Shadow ring lift pin
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US Patent D958764 Higher temperature vented susceptor
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US Patent 11764101 Susceptor for semiconductor substrate processing
Patent Inventor Names
Uday Kiran Rokkam
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Eric Hill
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
11018047
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Patent Primary Examiner
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Charlee J. C. Bennett
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