List of Therma-Wave patents

Patents where

Current Assignee

Name

Therma-Wave

Name	Description	Current Assignee	Patent Jurisdiction	Patent Number	Date of Patent
‌ US Patent 7248375 Critical dimension analysis with simultaneous multiple angle of incidence measurements	Patent 7248375 was granted and assigned to Therma-Wave on July, 2007 by the United States Patent and Trademark Office.	Therma-Wave	United States Patent and Trademark Office	7248375	July 24, 2007
‌ US Patent 6972852 Critical dimension analysis with simultaneous multiple angle of incidence measurements	Patent 6972852 was granted and assigned to Therma-Wave on December, 2005 by the United States Patent and Trademark Office.	Therma-Wave	United States Patent and Trademark Office	6972852	December 6, 2005
‌ US Patent 7099007 Method for determining ion concentration and energy of shallow junction implants	Patent 7099007 was granted and assigned to Therma-Wave on August, 2006 by the United States Patent and Trademark Office.	Therma-Wave	United States Patent and Trademark Office	7099007	August 29, 2006
‌ US Patent 7116424 Modulated reflectance measurement system with multiple wavelengths	Patent 7116424 was granted and assigned to Therma-Wave on October, 2006 by the United States Patent and Trademark Office.	Therma-Wave	United States Patent and Trademark Office	7116424	October 3, 2006
‌ US Patent 7251036 Beam splitter/combiner for optical metrology tool	Patent 7251036 was granted and assigned to Therma-Wave on July, 2007 by the United States Patent and Trademark Office.	Therma-Wave	United States Patent and Trademark Office	7251036	July 31, 2007
‌ US Patent 7233390 Scatterometry for samples with non-uniform edges	Patent 7233390 was granted and assigned to Therma-Wave on June, 2007 by the United States Patent and Trademark Office.	Therma-Wave	United States Patent and Trademark Office	7233390	June 19, 2007
‌ US Patent 7342661 Method for noise improvement in ellipsometers	Patent 7342661 was granted and assigned to Therma-Wave on March, 2008 by the United States Patent and Trademark Office.	Therma-Wave	United States Patent and Trademark Office	7342661	March 11, 2008
‌ US Patent 7215431 Systems and methods for immersion metrology	Patent 7215431 was granted and assigned to Therma-Wave on May, 2007 by the United States Patent and Trademark Office.	Therma-Wave	United States Patent and Trademark Office	7215431	May 8, 2007
‌ US Patent 7206125 Infrared blocking filter for broadband Optical metrology	Patent 7206125 was granted and assigned to Therma-Wave on April, 2007 by the United States Patent and Trademark Office.	Therma-Wave	United States Patent and Trademark Office	7206125	April 17, 2007
‌ US Patent 7190460 Focusing optics for small spot optical metrology	Patent 7190460 was granted and assigned to Therma-Wave on March, 2007 by the United States Patent and Trademark Office.	Therma-Wave	United States Patent and Trademark Office	7190460	March 13, 2007
‌ US Patent 7248367 Characterization of ultra shallow junctions in semiconductor wafers	Patent 7248367 was granted and assigned to Therma-Wave on July, 2007 by the United States Patent and Trademark Office.	Therma-Wave	United States Patent and Trademark Office	7248367	July 24, 2007
‌ US Patent 7145664 Global shape definition method for scatterometry	Patent 7145664 was granted and assigned to Therma-Wave on December, 2006 by the United States Patent and Trademark Office.	Therma-Wave	United States Patent and Trademark Office	7145664	December 5, 2006
‌ US Patent 7206071 Detector configurations for optical metrology	Patent 7206071 was granted and assigned to Therma-Wave on April, 2007 by the United States Patent and Trademark Office.	Therma-Wave	United States Patent and Trademark Office	7206071	April 17, 2007
‌ US Patent 7173700 Normal incidence rotating compensator ellipsometer	Patent 7173700 was granted and assigned to Therma-Wave on February, 2007 by the United States Patent and Trademark Office.	Therma-Wave	United States Patent and Trademark Office	7173700	February 6, 2007
‌ US Patent 7154607 Flat spectrum illumination source for optical metrology	Patent 7154607 was granted and assigned to Therma-Wave on December, 2006 by the United States Patent and Trademark Office.	Therma-Wave	United States Patent and Trademark Office	7154607	December 26, 2006
‌ US Patent 7280215 Photothermal system with spectroscopic pump and probe	Patent 7280215 was granted and assigned to Therma-Wave on October, 2007 by the United States Patent and Trademark Office.	Therma-Wave	United States Patent and Trademark Office	7280215	October 9, 2007
‌ US Patent 7227637 Measurement system with separate optimized beam paths	Patent 7227637 was granted and assigned to Therma-Wave on June, 2007 by the United States Patent and Trademark Office.	Therma-Wave	United States Patent and Trademark Office	7227637	June 5, 2007
‌ US Patent 7206070 Beam profile ellipsometer with rotating compensator	Patent 7206070 was granted and assigned to Therma-Wave on April, 2007 by the United States Patent and Trademark Office.	Therma-Wave	United States Patent and Trademark Office	7206070	April 17, 2007
‌ US Patent 7224461 Method for determining modifications to semiconductor optical functions	Patent 7224461 was granted and assigned to Therma-Wave on May, 2007 by the United States Patent and Trademark Office.	Therma-Wave	United States Patent and Trademark Office	7224461	May 29, 2007
‌ US Patent 7106459 CD metrology analysis using a finite difference method	Patent 7106459 was granted and assigned to Therma-Wave on September, 2006 by the United States Patent and Trademark Office.	Therma-Wave	United States Patent and Trademark Office	7106459	September 12, 2006
‌ US Patent 7106446 Modulated reflectance measurement system with multiple wavelengths	Patent 7106446 was granted and assigned to Therma-Wave on September, 2006 by the United States Patent and Trademark Office.	Therma-Wave	United States Patent and Trademark Office	7106446	September 12, 2006
‌ US Patent 7126690 Modulated reflectance measurement system using UV probe	Patent 7126690 was granted and assigned to Therma-Wave on October, 2006 by the United States Patent and Trademark Office.	Therma-Wave	United States Patent and Trademark Office	7126690	October 24, 2006
‌ US Patent 7212288 Position modulated optical reflectance measurement system for semiconductor metrology	Patent 7212288 was granted and assigned to Therma-Wave on May, 2007 by the United States Patent and Trademark Office.	Therma-Wave	United States Patent and Trademark Office	7212288	May 1, 2007
‌ US Patent 7239390 Modulated scatterometry	Patent 7239390 was granted and assigned to Therma-Wave on July, 2007 by the United States Patent and Trademark Office.	Therma-Wave	United States Patent and Trademark Office	7239390	July 3, 2007
‌ US Patent 7030984 Fast wafer positioning method for optical metrology	Patent 7030984 was granted and assigned to Therma-Wave on April, 2006 by the United States Patent and Trademark Office.	Therma-Wave	United States Patent and Trademark Office	7030984	April 18, 2006

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