US Patent 7206070 Beam profile ellipsometer with rotating compensator

Patent 7206070 was granted and assigned to Therma-Wave on April, 2007 by the United States Patent and Trademark Office.

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Is a

Patent

Patent attributes

Current Assignee

Therma-Wave

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

7206070

Date of Patent

April 17, 2007

Patent Application Number

11269204

Date Filed

November 8, 2005

Patent Primary Examiner

‌

Tu T. Nguyen

Patent abstract

An optical inspection device includes a light source for generating a probe beam. The probe beam is focused onto a sample to create a spread of angles of incidence. After reflecting from the sample, the light is imaged onto a two dimensional array of photodetectors. Prior to reaching the detector array, the beam is passed through a rotating compensator. A processor functions to evaluate the sample by analyzing the output of the photodetectors lying along one or more azimuthal angles and at different compensator positions.