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US Patent 7224461 Method for determining modifications to semiconductor optical functions

Patent 7224461 was granted and assigned to Therma-Wave on May, 2007 by the United States Patent and Trademark Office.

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Current Assignee
Therma-Wave
Therma-Wave
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent Number
7224461
Date of Patent
May 29, 2007
Patent Application Number
10847423
Date Filed
May 17, 2004
Patent Primary Examiner
‌
Gregory J. Toatley, Jr
Patent abstract

A method for modeling the complex refractive index of doped, strained or ultra-thin semiconductors starts with a model for a standard bulk material which may be in any form such as a pre-existing lookup table, a dispersion model derived from an effective medium approximation (EMA) or a critical point (CP) model. The modeling method perturbs the ∈2 curve of the bulk material by enhancing, suppressing or shifting the strong features of the curve. A Kramers-Kronig transformation is then applied to the ∈2 perturbation to obtain the corresponding perturbation to the ∈1 curve. The combination of the perturbed ∈2 curve and the correspondingly perturbed ∈1 curve are then used to obtain the complex dielectric function or complex refractive index of the modified material.

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