Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Youxian Wen0
Hanyou Chu0
Jon Opsal0
Xuelong Cao0
Date of Patent
December 5, 2006
0Patent Application Number
107846190
Date Filed
February 23, 2004
0Patent Primary Examiner
Patent abstract
A method for modeling samples includes the use of control points to define lines profiles and other geometric shapes. Each control point used within a model influences a shape within the model. Typically, the control points are used in a connect-the-dots fashion where a set of dots defines the outline or profile of a shape. The layers within the sample are typically modeled independently of the shape defined using the control points. The overall result is to minimize the number of parameters used to model shapes while maintaining the accuracy of the resulting scatterometry models.
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