US Patent 7145664 Global shape definition method for scatterometry
Patent 7145664 was granted and assigned to Therma-Wave on December, 2006 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
February 23, 2004
0
Date of Patent
December 5, 2006
0
Patent Application Number
10784619
0
Patent Inventor Names
Youxian Wen
0
Hanyou Chu
0
Jon Opsal
0
Xuelong Cao
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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