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US Patent 7126690 Modulated reflectance measurement system using UV probe

Patent 7126690 was granted and assigned to Therma-Wave on October, 2006 by the United States Patent and Trademark Office.

Overview Structured Data Issues Contributors

Is a

Patent

Patent attributes

Current Assignee

Therma-Wave

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

7126690

Date of Patent

October 24, 2006

Patent Application Number

10659626

Date Filed

September 10, 2003

Patent Primary Examiner

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Layla G. Lauchman

Patent abstract

A modulated reflectance measurement system includes lasers for generating an intensity modulated pump beam and a UV probe beam. The pump and probe beams are focused on a measurement site within a sample. The pump beam periodically excites the measurement site and the modulation is imparted to the probe beam. For one embodiment, the wavelength of the probe beam is selected to correspond to a local maxima of the temperature reflectance coefficient of the sample. For a second embodiment, the probe laser is tuned to either minimize the thermal wave contribution to the probe beam modulation or to equalize the thermal and plasma wave contributions to the probe beam modulation.