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US Patent 11876009 Overhead transport vehicle

Patent 11876009 was granted and assigned to Murata Machinery on January, 2024 by the United States Patent and Trademark Office.

OverviewStructured DataIssuesContributorsActivity
Is a
Patent
Patent
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Current Assignee
Murata Machinery
Murata Machinery
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Date Filed
September 30, 2019
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Date of Patent
January 16, 2024
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Patent Applicant
Murata Machinery
Murata Machinery
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Patent Application Number
17289784
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Patent Citations
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US Patent 8382417 Article transport facility
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US Patent 8602706 Substrate processing apparatus
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US Patent 8944739 Loadport bridge for semiconductor fabrication tools
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US Patent 9011068 Article transport facility
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US Patent 9187260 Conveying system and conveying method
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US Patent 9224628 Reduced capacity carrier, transport, load port, buffer system
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US Patent 9356822 Automated interface apparatus and method for use in semiconductor wafer handling systems
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US Patent 9633881 Automatic handling buffer for bare stocker
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US Patent 11664255 Method and gripper for rotating a cleanroom container
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US Patent 11024527 Methods and apparatus for novel fabricators with Cleanspace
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•••
Patent Citations Received
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US Patent 11952213 Ceiling suspended shelf
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Patent Inventor Names
Masataka Hayashi
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Masayoshi Torazawa
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
11876009
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Patent Primary Examiner
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Douglas A. Hess
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CPC Code
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B65G 1/06
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H01L 21/67733
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B65G 47/902
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B65G 47/61
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H01L 21/67724
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H01L 21/6773
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B61B 3/02
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B65G 1/0457
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