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US Patent 11664255 Method and gripper for rotating a cleanroom container

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Is a
Patent
Patent
0

Patent attributes

Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
116642550
Date of Patent
May 30, 2023
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Patent Application Number
168513250
Date Filed
April 17, 2020
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Patent Citations Received
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US Patent 11876009 Overhead transport vehicle
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Patent Primary Examiner
‌
Glenn F Myers
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CPC Code
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H01L 21/67733
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H01L 21/67766
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H01L 21/67736
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B25J 15/0033
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B25J 15/0014
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H01L 21/67718
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B66C 1/42
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B66C 1/62
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...

A gripper arrangement adapted for gripping a cleanroom container, such as a FOUP, FOSB or reticle container and a method therefore, includes: a gripper adapted to grip the cleanroom container; a lifting unit comprising a first motor for lifting the gripper; at least one cord connecting the gripper with the lifting unit, wherein the at least one cord is driven by the first motor; a second motor for rotating at least a portion of the gripper with respect to the lifting unit around the vertical axis; wherein the gripper comprises engagement elements and the lifting unit comprises complementary engagement elements adapted to engage with the engagement elements for preventing a rotation around the vertical axis of the gripper with respect to the lifting unit; wherein the gripper comprises an upper gripper element and a lower gripper element; wherein the lower gripper element is adapted for supporting the top flange of the cleanroom container; and the lower gripper element comprises an opening that can be passed over the upper flange of the cleanroom container and at least one recess formed at least partially around the opening for accommodating the upper flange of the cleanroom container.

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