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US Patent 11876009 Overhead transport vehicle

Patent 11876009 was granted and assigned to Murata Machinery on January, 2024 by the United States Patent and Trademark Office.

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Contents

Is a
Patent
Patent
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Patent attributes

Patent Applicant
Murata Machinery
Murata Machinery
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Current Assignee
Murata Machinery
Murata Machinery
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
118760090
Patent Inventor Names
Masataka Hayashi0
Masayoshi Torazawa0
Date of Patent
January 16, 2024
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Patent Application Number
172897840
Date Filed
September 30, 2019
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Patent Citations
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US Patent 8382417 Article transport facility
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US Patent 8602706 Substrate processing apparatus
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US Patent 8944739 Loadport bridge for semiconductor fabrication tools
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US Patent 9011068 Article transport facility
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US Patent 9187260 Conveying system and conveying method
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US Patent 9224628 Reduced capacity carrier, transport, load port, buffer system
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US Patent 9356822 Automated interface apparatus and method for use in semiconductor wafer handling systems
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US Patent 9633881 Automatic handling buffer for bare stocker
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...
Patent Citations Received
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US Patent 11952213 Ceiling suspended shelf
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Patent Primary Examiner
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Douglas A. Hess
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CPC Code
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B65G 1/06
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H01L 21/67733
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B65G 47/902
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B65G 47/61
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H01L 21/67724
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H01L 21/6773
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B61B 3/02
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B65G 1/0457
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Patent abstract

An overhead transport vehicle travels along a rail on a ceiling of a building to transport a FOUP. The overhead transport vehicle includes a holding base and an upper shelf transfer device. The holding base holds at least one of a side surface and a bottom surface of the FOUP. The upper shelf transfer device moves the holding base at least upwardly while holding the FOUP. The upper shelf transfer device moves the holding base from the holding position in which the holding base holds and transfers the FOUP to the upper transfer position to transfer the FOUP, which is a different position from the holding position in a plan view and higher than the holding position.

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