Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Lutz Rebstock0
Date of Patent
April 25, 2017
0Patent Application Number
120257520
Date Filed
February 5, 2008
0Patent Citations Received
Patent Primary Examiner
Patent abstract
A buffer station for automatic material handling system can provide throughput improvement. Further, by storing to-be-accessed workpieces in the buffer stations of an equipment, the operation of the facility is not interrupted when the equipment is down. The buffer station can be incorporated in a stocker, such as bare wafer stocker.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
