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US Patent 8602706 Substrate processing apparatus

Patent 8602706 was granted and assigned to Brooks Automation on December, 2013 by the United States Patent and Trademark Office.

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Patent

Patent attributes

Current Assignee

Brooks Automation

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

8602706

Date of Patent

December 10, 2013

Patent Application Number

12542588

Date Filed

August 17, 2009

Patent Citations Received

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US Patent 12024368 Linear motor conveyor system for clean/aseptic environments

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US Patent 11769680 Substrate transport vacuum platform

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US Patent 11862498 Substrate processing apparatus

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US Patent 11876009 Overhead transport vehicle

Patent Primary Examiner

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Gregory Adams

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