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US Patent 11562881 Charged particle beam system

OverviewStructured DataIssuesContributorsActivity
Is a
Patent
Patent
0
Date Filed
October 28, 2021
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Date of Patent
January 24, 2023
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Patent Application Number
17512825
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Patent Citations
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US Patent 10354831 Charged particle inspection method and charged particle system
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US Patent 10388487 Method for operating a multi-beam particle microscope
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US Patent 10535494 Particle beam system and method for the particle-optical examination of an object
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US Patent 10541112 Charged particle beam system and method of operating the same
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US Patent 10586677 Semiconductor apparatus and charged particle ray exposure apparatus
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US Patent 10600613 Particle beam system
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US Patent 10622184 Objective lens arrangement usable in particle-optical systems
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US Patent 10643820 Apparatus of plural charged-particle beams
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US Patent 10741355 Multi-beam charged particle system
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US Patent 10811215 Charged particle beam system
•••
Patent Citations Received
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US Patent 12094683 Method for operating a multi-beam particle beam microscope
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Patent Inventor Names
Christof Riedesel
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Antonio Casares
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Stefan Schubert
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Mario Muetzel
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Joerg Jacobi
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Ingo Mueller
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Dirk Zeidler
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
11562881
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Patent Primary Examiner
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Nicole M Ippolito
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CPC Code
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H01J 2237/057
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H01J 37/28
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H01J 37/244
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H01J 37/21
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H01J 37/1472
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H01J 37/06
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H01J 37/05
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H01J 2237/2801
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H01J 37/14
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