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US Patent 10600613 Particle beam system

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Is a

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Patent attributes

Patent Jurisdiction

United States Patent and Trademark Office

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Patent Number

Date of Patent

March 24, 2020

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Patent Application Number

161960810

Date Filed

November 20, 2018

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Patent Citations

US Patent 10147582 Particle beam system

Patent Citations Received

US Patent 12119204 Particle beam system and the use thereof for flexibly setting the current intensity of individual particle beams

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US Patent 12094683 Method for operating a multi-beam particle beam microscope

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US Patent 11521827 Method of imaging a 2D sample with a multi-beam particle microscope

US Patent 11239053 Charged particle beam system and method

US Patent 11239054 Multi-beam particle beam system

US Patent 11562881 Charged particle beam system

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US Patent 11562880 Particle beam system for adjusting the current of individual particle beams

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Patent Primary Examiner

Nicole M Ippolito

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