Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
March 10, 2020
Patent Application Number
16288319
Date Filed
February 28, 2019
Patent Citations Received
0
...
Patent Primary Examiner
Patent abstract
A semiconductor apparatus according to an embodiment is a semiconductor apparatus including substrate having a recess provided at a first substrate face, a plurality of through holes provided in a predetermined region of the recess, and a plurality of protrusions provided on the recess in the predetermined region.
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