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US Patent 10811215 Charged particle beam system

Overview Structured Data Issues Contributors

Is a

Patent attributes

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

Date of Patent

October 20, 2020

Patent Application Number

16416447

Date Filed

May 20, 2019

Patent Citations Received

US Patent 12119204 Particle beam system and the use thereof for flexibly setting the current intensity of individual particle beams

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US Patent 11562881 Charged particle beam system

US Patent 11562880 Particle beam system for adjusting the current of individual particle beams

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US Patent 12094683 Method for operating a multi-beam particle beam microscope

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US Patent 11521827 Method of imaging a 2D sample with a multi-beam particle microscope

US Patent 11645740 Method for detector equalization during the imaging of objects with a multi-beam particle microscope

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US Patent 11657999 Particle beam system and method for the particle-optical examination of an object

0

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Patent Primary Examiner

Nicole M Ippolito

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