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US Patent 10622184 Objective lens arrangement usable in particle-optical systems

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Is a

Patent

Patent attributes

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

106221840

Date of Patent

April 14, 2020

Patent Application Number

156326580

Date Filed

June 26, 2017

Patent Citations Received

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US Patent 12119204 Particle beam system and the use thereof for flexibly setting the current intensity of individual particle beams

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US Patent 12094683 Method for operating a multi-beam particle beam microscope

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US Patent 11521827 Method of imaging a 2D sample with a multi-beam particle microscope

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US Patent 11239053 Charged particle beam system and method

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US Patent 11239054 Multi-beam particle beam system

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US Patent 11562881 Charged particle beam system

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US Patent 11562880 Particle beam system for adjusting the current of individual particle beams

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Patent Primary Examiner

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Brooke Purinton

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