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US Patent 11286562 Gas-phase chemical reactor and method of using same

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edited on 4 Dec, 2023

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US Patent D1005974 Gas distributor for semiconductor manufacturing apparatus

Edits on 11 Oct, 2023

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edited on 11 Oct, 2023

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US Patent 11784043 Formation of SiN thin films

Edits on 20 May, 2023

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edited on 20 May, 2023

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https://pdfpiw.uspto.gov/.piw?Docid=1128656200

Edits on 29 Apr, 2023

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edited on 29 Apr, 2023

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US Patent 10186420 Formation of silicon-containing thin films

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edited on 28 Apr, 2023

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US Patent 10276355 Multi-zone reactor, system including the reactor, and method of using the same

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Golden AI

edited on 28 Apr, 2023

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US Patent 10018920 Lithography patterning with a gas phase resist

Edits on 25 Apr, 2023

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US Patent 10087522 Deposition of metal borides

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Golden AI

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US Patent 10622196 Plasma processing apparatus

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Golden AI

edited on 25 Apr, 2023

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US Patent 10468251 Method for forming spacers using silicon nitride film for spacer-defined multiple patterning

Edits on 25 Apr, 2023

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Golden AI

edited on 25 Apr, 2023

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US Patent 10179947 Method for forming conformal nitrided, oxidized, or carbonized dielectric film by atomic layer deposition

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edited on 24 Apr, 2023

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US Patent 10229851 Self-forming barrier for use in air gap formation

Edits on 24 Apr, 2023

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edited on 24 Apr, 2023

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US Patent 10047435 Dual selective deposition

Edits on 7 Apr, 2023

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edited on 7 Apr, 2023

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US Patent 10017856 Flowable gapfill using solvents

Edits on 7 Apr, 2023

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edited on 7 Apr, 2023

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US Patent 11587783 Si precursors for deposition of SiN at low temperatures

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edited on 6 Apr, 2023

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US Patent 10134757 Method of processing a substrate and a device manufactured by using the method

Edits on 5 Apr, 2023

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edited on 5 Apr, 2023

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US Patent 10590531 Substrate processing apparatus, and method of manufacturing semiconductor device

Edits on 5 Apr, 2023

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edited on 5 Apr, 2023

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US Patent 10332963 Uniformity tuning of variable-height features formed in trenches

Edits on 4 Apr, 2023

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edited on 4 Apr, 2023

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US Patent 10106892 Thermal oxide equivalent low temperature ALD oxide for dual purpose gate oxide and method for producing the same

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edited on 4 Apr, 2023

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US Patent 10190214 Deposition apparatus and deposition system having the same

Edits on 2 Apr, 2023

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edited on 2 Apr, 2023

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US Patent 10060473 Energy conversion systems and methods

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