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US Patent 11239053 Charged particle beam system and method

OverviewStructured DataIssuesContributorsActivity
Is a
Patent
Patent
Date Filed
August 25, 2020
Date of Patent
February 1, 2022
Patent Application Number
17002472
Patent Citations
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US Patent 10141160 Apparatus of plural charged-particle beams
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US Patent 10354831 Charged particle inspection method and charged particle system
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US Patent 10388487 Method for operating a multi-beam particle microscope
‌
US Patent 10535494 Particle beam system and method for the particle-optical examination of an object
‌
US Patent 10541112 Charged particle beam system and method of operating the same
‌
US Patent 10600613 Particle beam system
‌
US Patent 10586677 Semiconductor apparatus and charged particle ray exposure apparatus
‌
US Patent 10622184 Objective lens arrangement usable in particle-optical systems
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US Patent 10062541 Apparatus of plural charged-particle beams
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US Patent 10121635 Charged particle beam system and method of operating the same
Patent Citations Received
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US Patent 12094683 Method for operating a multi-beam particle beam microscope
0
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent Number
11239053
Patent Primary Examiner
‌
Phillip A Johnston

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