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US Patent 10763139 Vacuum transfer module and substrate processing apparatus

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Edits on 20 May, 2023

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Golden AI

edited on 20 May, 2023

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Official Website

https://pdfpiw.uspto.gov/.piw?Docid=107631390

Edits on 29 Apr, 2023

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Golden AI

edited on 29 Apr, 2023

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Patent Citations Received

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US Patent D947913 Susceptor shaft

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Golden AI

edited on 28 Apr, 2023

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US Patent 11004977 Method for depositing a group IV semiconductor and related semiconductor device structures

Edits on 28 Apr, 2023

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Golden AI

edited on 28 Apr, 2023

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US Patent 11296189 Method for depositing a phosphorus doped silicon arsenide film and related semiconductor device structures

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Golden AI

edited on 25 Apr, 2023

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US Patent 11274369 Thin film deposition method

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Golden AI

edited on 22 Apr, 2023

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US Patent 11286558 Methods for depositing a molybdenum nitride film on a surface of a substrate by a cyclical deposition process and related semiconductor device structures including a molybdenum nitride film

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Golden AI

edited on 7 Apr, 2023

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US Patent 11022879 Method of forming an enhanced unexposed photoresist layer

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Golden AI

edited on 7 Apr, 2023

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US Patent 11242598 Structures including metal carbide material, devices including the structures, and methods of forming same

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Golden AI

edited on 6 Apr, 2023

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US Patent 11053591 Multi-port gas injection system and reactor system including same

Edits on 4 Apr, 2023

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Golden AI

edited on 4 Apr, 2023

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US Patent 11251068 Substrate processing apparatus and substrate processing method

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Golden AI

edited on 2 Apr, 2023

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US Patent 11056344 Layer forming method

Edits on 31 Mar, 2023

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Golden AI

edited on 31 Mar, 2023

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US Patent 11244825 Methods for depositing a transition metal chalcogenide film on a substrate by a cyclical deposition process

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Golden AI

edited on 30 Mar, 2023

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US Patent 11286562 Gas-phase chemical reactor and method of using same

Edits on 29 Mar, 2023

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Golden AI

edited on 29 Mar, 2023

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US Patent 11289326 Method for reforming amorphous carbon polymer film

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Golden AI

edited on 27 Mar, 2023

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US Patent 11282698 Method of forming topology-controlled amorphous carbon polymer film

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Golden AI

edited on 27 Mar, 2023

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US Patent 11018002 Method for selectively depositing a Group IV semiconductor and related semiconductor device structures

Edits on 26 Mar, 2023

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Golden AI

edited on 26 Mar, 2023

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US Patent 11251040 Cyclical deposition method including treatment step and apparatus for same

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Golden AI

edited on 26 Mar, 2023

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US Patent 11295980 Methods for depositing a molybdenum metal film over a dielectric surface of a substrate by a cyclical deposition process and related semiconductor device structures

Edits on 24 Mar, 2023

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Golden AI

edited on 24 Mar, 2023

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US Patent 11031242 Methods for depositing a boron doped silicon germanium film

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Golden AI

edited on 24 Mar, 2023

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US Patent D944946 Shower plate

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