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US Patent 10483235 Stacked electronic device and method for fabricating the same

Patent 10483235 was granted and assigned to Winbond on November, 2019 by the United States Patent and Trademark Office.

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Contents

Is a
Patent
Patent

Patent attributes

Patent Applicant
Winbond
Winbond
Current Assignee
Winbond
Winbond
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent Number
10483235
Date of Patent
November 19, 2019
Patent Application Number
15057973
Date Filed
March 1, 2016
Patent Citations Received
‌
US Patent 12023853 Polishing articles and integrated system and methods for manufacturing chemical mechanical polishing articles
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US Patent 11980992 Integrated abrasive polishing pads and manufacturing methods
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US Patent 11986922 Techniques for combining CMP process tracking data with 3D printed CMP consumables
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US Patent 11471999 Integrated abrasive polishing pads and manufacturing methods
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US Patent 11524384 Abrasive delivery polishing pads and manufacturing methods thereof
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US Patent 11685014 Formulations for advanced polishing pads
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US Patent 11745302 Methods and precursor formulations for forming advanced polishing pads by use of an additive manufacturing process
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US Patent 11772229 Method and apparatus for forming porous advanced polishing pads using an additive manufacturing process
...
Patent Primary Examiner
‌
Steven H Loke
Patent abstract

A method for fabricating a stacked electronic device is provided. A first three-dimensional (3D) printing is performed to form a first insulating layer and a plurality of first redistribution layers (RDLs) on a first substrate. A second 3D printing is performed to form a second substrate and a plurality of through-substrate vias (TSVs) on the first insulating layer, in which the plurality of TSVs is electrically connected to the plurality of first RDLs. A third 3D printing is performed to form a second insulating layer and a plurality of second RDLs on the second substrate, in which the plurality of second RDLs is electrically connected to the plurality of TSVs. A plurality of contacts of a third substrate is bonded to the plurality of second RDLs, so that the substrate is mounted onto the second insulating layer. The disclosure also provides a stacked electronic device formed by such a method.

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