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US Patent 7129502 Apparatus for generating a plurality of beamlets

OverviewStructured DataIssuesContributors
Is a
Patent
Patent
Date Filed
March 10, 2004
Date of Patent
October 31, 2006
Patent Application Number
10797364
Patent Citations Received
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US Patent 12119204 Particle beam system and the use thereof for flexibly setting the current intensity of individual particle beams
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US Patent 12068130 Method and device for spatial charged particle bunching
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US Patent 12094683 Method for operating a multi-beam particle beam microscope
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US Patent 11705252 Vacuum chamber arrangement for charged particle beam generator
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US Patent 11935721 System comprising a multi-beam particle microscope and method for operating the same
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US Patent 11961627 Vacuum chamber arrangement for charged particle beam generator
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US Patent RE49952 Beam grid layout
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent Number
7129502
Patent Primary Examiner
Jack I. Berman
Jack I. Berman

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