Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
October 31, 2006
Patent Application Number
10797364
Date Filed
March 10, 2004
Patent Citations Received
0
Patent Primary Examiner
Patent abstract
The invention relates to an apparatus for generating a plurality of charged particle beamlets, comprising a charged particle source for generating a diverging charged particle beam, a converging means for refracting said diverging charged particle beam and a lens array comprising a plurality of lenses, wherein said lens array is located between said charged particle source and said converging means.
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