US Patent 12094694 Substrate processing apparatus and substrate processing method
Patent 12094694 was granted and assigned to Tokyo Electron on September, 2024 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
January 14, 2021
0
Date of Patent
September 17, 2024
0
Patent Applicant
Patent Application Number
17149246
0
Patent Citations
Patent Inventor Names
Tamihiro Kobayashi
0
Sumi Tanaka
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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