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US Patent 8813678 Substrate processing apparatus

Patent 8813678 was granted and assigned to Tokyo Electron on August, 2014 by the United States Patent and Trademark Office.

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Patent

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Current Assignee

Tokyo Electron

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

88136780

Patent Inventor Names

Kazuo Sakamoto0

Date of Patent

August 26, 2014

Patent Application Number

135864370

Date Filed

August 15, 2012

Patent Citations Received

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US Patent 12094694 Substrate processing apparatus and substrate processing method

Patent Primary Examiner

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Laura Edwards

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