US Patent 12072318 Chamber component cleanliness measurement system
Patent 12072318 was granted and assigned to Lam Research on August, 2024 by the United States Patent and Trademark Office.
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US Patent 12072318 Chamber component cleanliness measurement system
Article
Patent abstract
An apparatus for measuring contaminants on a surface of a component is provided. An extraction vessel for holding a measurement fluid has an opening adapted to form a meniscus using the measurement fluid. An actuator moves at least one of the extraction vessel and the component to a position where the meniscus is in contact with the surface of the component. A transducer is positioned to provide acoustic energy to the measurement fluid.
Infobox
Is a
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Amir A. Yasseri0
Armen Avoyan0
Cliff La Croix0
Duane Outka0
Girish M. Hundi0
John Daugherty0
Kennet Cresencio Baylon0
Date of Patent
August 27, 2024
0Patent Application Number
176123810
Date Filed
May 19, 2020
0Patent Citations
Patent Primary Examiner
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